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Micro-mechanical & Microfluidic Devices & Systems - ELE00069H

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  • Department: Electronic Engineering
  • Module co-ordinator: Dr. Samadhan Patil
  • Credit value: 20 credits
  • Credit level: H
  • Academic year of delivery: 2022-23

Module summary

This module will develop advanced concepts in two important areas of microengineering – MEMS and microfluidic systems – focussing on the fundamental physical mechanisms that underpin these emerging technologies, approaches to design, fabricate and characterise MEMS and microfluidic devices, and their applications particularly in the chemical, biological and clinical sciences.

Related modules

Pre-requisite: Principles of Microengineering (currently being created in the system)

Module will run

Occurrence Teaching period
A Spring Term 2022-23 to Summer Term 2022-23

Module aims

Subject content aims:

To provide students with a basic understanding about first design principles of MEMS and microfluidic devices, micro-fabrication and characterization of these devices and a brief exposure about their application areas (particularly in the chemical, biological and clinical sciences).

Graduate skills aims:

  • To provide exposure and 1st hand experience of micro-fabrication skills in the cleanroom environment, basic observation and characterization of the devices using different microscopy techniques.

  • To understand the challenges towards miniaturisation of the devices.

Module learning outcomes

Subject content learning outcomes

After successful completion of this module, students will:

  • Be able to explain the physical principles that underpin mechanics and dynamics of MEMS and microfluidic devices.

  • Be able to demonstrate theoretical and practical understanding of the materials and fabrication methods used in the production of MEMS and microfluidic devices and components.

  • Be able to simulate, design and characterise MEMS and microfluidics devices.

  • Be able to describe current and emerging applications of MEMS technology and lab-on-chip systems, particularly in the biological, clinical and chemical sciences.

  • Ba able to analyse the next-generation of MEMS and microfluidic systems.

  • Design and critically evaluate a microfluidic system to provide hands-on experience.

Graduate skills learning outcomes

After successful completion of this module, students will:

  • Be able to explain and evaluate upcoming technologies.

  • Have developed skills for appropriate numerical and simulation techniques.

  • Be able to understand and interpret observed images using microscopy techniques.

  • Have developed skills in working in a sensitive and protected laboratory environment.

Module content

  • Introduction to the fundamental scaling laws and physical mechanisms that regulate mechanics and dynamics in geometrically constrained electro-mechanical systems.

  • Numerical methods for the simulation and design of functional MEMS

  • Detailed understanding of microfabrication technology and processes: inc. lithography (optical, x-ray and electron beam), thin film deposition techniques (thermal evaporation, CVD/PECVD, sputtering, ALD), wet and dry etching (RIE and DRIE), wafer bonding and encapsulation.

  • Applications of MEMS inc., metrology (e.g., accelerometers), switches and oscillators, medical diagnostics, energy harvesting, optics/displays

  • Introduction to the fundamental physical mechanisms that regulate fluid dynamics in geometrically constrained systems inc., interfacial, gravitational, viscous and inertial forces, Reynolds number, mass transport.

  • Numerical methods for the design and fabrication of microfluidic devices

  • Materials for manufacturing of microfluidic devices and associated fabrication approaches (inc., soft lithography, injection moulding, LIGA)

  • Characterisation of fluid dynamics in microfluidic devices and components.

  • From passive microfluidic devices to lab-on-chip: Integration of microfluidics with active components including valves, pumps, sensors and actuators.

  • Applications of microfluidic devices particularly within the biological, medical and chemical sciences.

Indicative assessment

Task Length % of module mark
Essay/coursework
Individual Report		 N/A 100

Special assessment rules

None

Indicative reassessment

Task Length % of module mark
Essay/coursework
Individual Report		 N/A 100

Module feedback

Formative Feedback

During demonstrations or practicals in the laboratory, in person and verbal help and feedback will be provided to engage with the micro-fabrications skills. In classroom spoken feedback or answers to the queries will also be provided during and after the lecture. The students will also have an opportunity to have technical discussions with the module Coordinator during the workshops and open sessions in office hours. Emails from the students in the form of queries will be answered by the module coordinator as soon as possible.

Summative Feedback

Feedback on final assessment on individual report and mini-project report will be available to the students within 25 working days of the submission deadline. Apart from this feedback, students will also receive spoken feedback during the workshops and open session about the queries on the final assessment throughout the terms.

Indicative reading

Introduction to Microfluidics. P. Tabeling. Oxford University Press, 2005.

Microsensors MEMS and Smart Devices, J Gardner, V Varadan, O Awadelkarim, Wiley, 2007.

Essentials of Micro- and nanofluidics, A. Terrence Conlisk, Cambridge University Press, 2013.

Sensor Technology and Devices, Ljubisa Ristic, 1994.

Microsensors, MEMS, and smart devices / Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim, 2001

Automotive sensors / M.H. Westbrook and J.D. Turner, 1994.

Sensors : principles and applications / Peter Hauptmann ; translated by Tim Pownall, 1993.

Fundamentals of Microfabrication and Nanotechnology, Marc J. Madou, 3rd Edition, 2011

Microsystem Design, Stephan D. Senturia, Springer, 2000

Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems, Ville Kaajakari, Small Gear Publishing, 2009


The information on this page is indicative of the module that is currently on offer. The University constantly explores ways to enhance and improve its degree programmes and therefore reserves the right to make variations to the content and method of delivery of modules, and to discontinue modules, if such action is reasonably considered to be necessary. In some instances it may be appropriate for the University to notify and consult with affected students about module changes in accordance with the University's policy on the Approval of Modifications to Existing Taught Programmes of Study.